Kev tshuaj xyuas qhov roughness ntawm qhov chaw, qhov siab ntawm cov kauj ruam thiab cov zaj duab xis nyias nyias ntawm cov wafers semiconductor, cov iav kho qhov muag precision thiab cov khoom coated ncaj qha txiav txim siab qhov ntau lawm. Kev tshuaj xyuas cov khoom siv sib cuag ib txwm yooj yim khawb cov qauv me me, thaum cov khoom siv ntsuas kho qhov muag ib txwm tsis tuaj yeem xa cov khoom siv nano-level precision. Yuav ua li cas thiaj ua tiav kev sim tsis puas tsuaj, qhov tseeb ntawm nano siab heev thiab kev tshuaj xyuas ntau lawm tib lub sijhawm?
Wavelength OE lub teeb dawb interferometer tshiab muaj ob hom kev ntsuas interferometry. Nrog rau kev kuaj pom tsis sib cuag, nws npog tag nrho cov haujlwm los ntawm kev tshawb fawb thiab kev txhim kho hauv chaw kuaj mob mus rau kev tsim khoom hauv online.
Dual Core Interferometry Hom rau Txhua Qhov Chaw Saum Toj
Tsis zoo li cov khoom siv ntsuas ib hom, lub kaw lus no sib xyaw ua ke VSI (Vertical Scanning Interferometry) thiab PSI (Phase-Shifting Interferometry) algorithms, ua kom tau raws li ob qhov kev xav tau ntsuas tseem ceeb nrog ib lub tshuab.
| Khoom sib piv | VSI / CSI | PSI |
|---|---|---|
| Cov Nto Tseem Ceeb Siv Tau | Cov nto ntxhib, cov kauj ruam, cov toj roob hauv pes tsis sib txuas thiab cov av nyuaj | Cov nto du thiab du, txuas ntxiv mus thiab daim iav |
| Kev Ntsuas Qhov Siab Ntsug | Ntau yam dav; muaj peev xwm ntsuas cov qhov tob thiab cov kauj ruam siab | Qhov dav nqaim; tsis haum rau cov kauj ruam loj uas cais tawm |
| Kev daws teeb meem ntsug | Qib Nanometer; sub-nanometer ua tau nrog cov algorithms zoo tshaj plaws | Kev daws teeb meem siab tshaj plaws; rov ua dua mus txog rau sub-nanometer txawm tias qib sub-angstrom |
| Kev kam rau qhov Roughness ntawm qhov chaw | Siab | Qis |
| Kev Tsis Sib Haum Xeeb ntawm Theem | Yuav luag tsis muaj li; qhov siab kawg nkaus muaj qhov tso zis | Raug rau qhov yuam kev qhwv theem 2π |
| Kev Ntsuas Ceev | Yuav tsum tau axial scanning, qeeb me ntsis | Feem ntau sai dua |
| Kev Tiv Thaiv Kev Co | Muaj kev cuam tshuam rau kev co thaum lub sijhawm luam theej duab | Kev hloov pauv ntau theem, rhiab heev rau kev co |
| Cov Ntawv Thov Ib Txwm Muaj | Qhov ntxhib, qhov siab ntawm cov kauj ruam, cov qauv me me, cov nto tshuab | Kev ntsuas qhov roughness ntawm qhov chaw du thiab du, qhov zoo li ntawm qhov chaw thiab qhov tiaj tiaj |
PSI (Phase-Shifting Interferometry): Tshwj xeeb hauv cov yam ntxwv me me ntawm qhov siab nano-scale thiab cov yeeb yaj kiab ultra-thin, xa cov kev daws teeb meem me me kawg.
Daim iav dav hlau
Iav Ntxig (Iav Convex)
Qauv Qauv Photolithographic
VSI Vertical Scanning Interferometry: Zoo rau cov workpieces nrog qhov siab sib txawv thiab cov kauj ruam siab; muaj tag nrho cov ntsuas ntau yam tsis muaj kev luam theej segmented.
Cov khoom siv micro bump array ntawm cov wafers ntim khoom siab heev
Elliptical micro bump array ntawm cov wafers ntim siab heev
cov microlens array
Sib phim nrog lub teeb dawb luv luv 450–700 nm, nws tuaj yeem tiv thaiv lub teeb tsis pom kev los ntawm ntau qhov kev cuam tshuam thiab muab kev ua haujlwm tiv thaiv kev cuam tshuam zoo. Nruab nrog ntau txheej txheej, cov khoom siv kho qhov muag no nrog kev cuam tshuam qis tuaj yeem tso tawm cov teeb liab cuam tshuam ruaj khov thiab sib txawv, ua rau muaj cov txiaj ntsig ntsuas tseeb thiab txhim khu kev qha.
2. Cov Lus Qhia Txog Qib Nano Uas Ua Tau Zoo Tshaj Plaws Hauv Kev Lag Luam, Cov Ntaub Ntawv Uas Nrhiav Tau Thiab Ruaj Khoov Mus Ntev
-Lub kaw lus siv lub teeb dawb LED nrog lub qhov ntev nruab nrab ntawm 550 nm, nruab nrog cov txheej txheem ua haujlwm siab tshaj plaws uas phim cov qauv thoob ntiaj teb.
-Kev daws teeb meem ntsug: <1 nm, rov ua qhov yuam kev ntsuas: <10 nm, qhov tseeb nanometer precision
-Qhov ntsuas ntsug siab tshaj plaws: 500 μm, tsis tas yuav rov ua dua rau cov qauv me me siab-qis.
-Kev ceev scanning: 100 μm/s, ib qho kev luam theej tag nrho ua tiav hauv 10 vib nas this, sib npaug qhov tseeb thiab kev tshuaj xyuas throughput.
-Ua raws li NIST cov qauv taug qab, cov txheej txheem ntsuas tus kheej ua kom ntseeg tau tias cov ntaub ntawv taug qab tau zoo sib xws, ua tau raws li cov qauv QC nruj rau kev lag luam semiconductor thiab optical.
| Khoom | Cov Qauv |
| Kev Ntsuas Peev Xwm | 3D nto topography, qhov roughness ntawm qhov chaw, qhov siab ntawm cov kauj ruam & zaj duab xis tuab ntawm cov ntaub ntawv reflective thiab cov khoom siv kho qhov muag |
| Hom Kev Tau Txais Cov Ntaub Ntawv | Kev Ntsuas Ntsuas Ntsug (VSI) + Kev Hloov Pauv Hloov Pauv (PSI) |
| Kev Ntsuas Qhov System | NIST tus qauv taug qab tau + tsis siv neeg calibration algorithm |
| Kev Ntsuas Ntsug Ntau Yam | 500 μm |
| Thaj Chaw Saib | 20 × lub hom phiaj: 0.87 × 0.65 hli |
| Kev Ua Haujlwm ntawm Lub Koob Yees Duab | Kev daws teeb meem siab tshaj plaws: 2048 × 2448; Tus nqi ncej: 74 Fps; Qhov tob ntawm ntsis: 12 ntsis |
| Kev Ceev Luam theej duab | 100 μm/s (Hom Kev Ntsuas Tseeb) |
| Cov Kev Xaiv Lens Lub Hom Phiaj | Lub hom phiaj loj hlob 20x / 50x uas kho tau |
| Tsim Kev Teeb Tsa | Ua-nyob rau hauv active vibration cais platform, kab rov tav & ntsug mounting muaj |
| Qhov Loj Tag Nrho (L × W × H) | 120 × 80 × 65 cm |
| Qhov Hnyav Tag Nrho | ≤58 kg |
3. Kev Tsim Kho Txee Hauv Kev Lag Luam, Sib Xws Nrog Chav Kuaj & Kab Ntau Lawm
Zoo rau ob qho chaw tsim khoom loj thiab chaw tshawb fawb nrog kev sib haum xeeb yooj yim.
Lub platform cais kev co uas ua haujlwm tau zoo: Kev ntsuas ruaj khov nyob rau hauv lub Hoobkas kev co, tsis tas yuav muaj lub rooj cais kev co ntxiv.
Dual mounting qauv: Kab rov tav lossis ntsug teeb tsa, yooj yim kev koom ua ke nrog cov kab ntau lawm tsis siv neeg thiab cov chaw ua haujlwm hauv chav kuaj.
Lub cev me me uas muaj txhua yam hauv ib lub: Qhov chaw me me nrog qhov ntev 120 × 80 × 65 cm, qhov hnyav ≤58 kg, yooj yim rau kev xa tawm ntawm qhov chaw.
Lub kaw lus tag nrho muaj lub teeb ci, lub interferometer tseem ceeb thiab lub module tswj. Plug-and-play tom qab qhib lub thawv, tsis tas yuav hloov kho txoj kev pom kev nyuaj.
Kev Siv Dav Dav rau Kev Tsim Khoom Siv Siab
Kev Lag Luam Semiconductor: 3D topography & kauj ruam siab tshuaj xyuas ntawm silicon wafers thiab micro-nano chips.
Kev Ntsuas Qhov Muag Pom Kev Zoo: Kev ntsuas qhov ntxhib thiab tuab ntawm cov iav tsom iav, cov hom phiaj thiab cov khoom siv tsom iav uas tau coated.
Cov Txheej Txheem Tshiab: Kev tshuaj xyuas qhov profile ntawm qhov chaw thiab qhov tuab ntawm cov txheej txheem cuam tshuam & cov yeeb yaj kiab nyias ua haujlwm.
Cov Chaw Tshawb Fawb Txog Kev Tshawb Fawb: Kev piav qhia txog cov qauv micro-nano & kev sim cov qauv ntawm cov khoom.
Nrog ntau xyoo ntawm kev paub txog kev kho qhov muag R & D, Wavelength OE ywj pheej tsim txhua txoj kev kho qhov muag tseem ceeb thiab cov txheej txheem ntsuas rau lub teeb dawb interferometers. Kev tswj hwm tag nrho los ntawm cov chaw teeb pom kev zoo, lub hom phiaj lens mus rau cov txheej txheem calibration. Txhua chav tsev dhau los ntawm ntau qhov kev ntsuas qhov tseeb ua ntej xa khoom. Peb muab kev txhawb nqa kev pabcuam tom qab muag tag nrho thiab kho cov kev daws teeb meem tshwj xeeb raws li qhov loj me ntawm cov khoom siv ntawm cov neeg siv khoom thiab cov kab ntau lawm tsis siv neeg.
Lub sijhawm tshaj tawm: Lub Xya Hli-15-2026